MKS 179B02714CS3BM Mass Flow Meter 10000 SCCM N2O Nitrous Oxide

MKS 179B02714CS3BM Mass Flow Meter 10000 SCCM N2O Nitrous Oxide

[Condition]

Unit is used, in great condition, pulled from a working decommissioned system. See photos, item comes as shown.

[Info on Unit]

Manufacturer: MKS Instruments, Inc.

Model Number: 179B02714CS3BM

Series: 179B

Instrument Type: Mass Flow Meter

Function: Gas Mass Flow Measurement

Calibrated Gas: N2O (Nitrous Oxide)

Full Scale Flow Range: 10,000 SCCM

Equivalent Full Scale Range: 10 SLM

Serial Number: 022584386

Additional Serial Marking: 08XX19

Measurement Technology: Thermal Mass Flow

Accuracy: ±0.5% of Reading + ±0.2% of Full Scale

Measurement Resolution: 0.1% of Full Scale

Pressure Coefficient: 0.02% of Reading per PSI

Maximum Inlet Pressure: 150 PSIG

Zero Temperature Coefficient: <0.04% of Full Scale per °C

Span Temperature Coefficient: <0.08% of Reading per °C

Input Power: 20.5–31.5 VDC

Maximum Startup Current: 200 mA

Typical Steady-State Current: 100 mA

[Description]

The MKS Instruments 179B02714CS3BM is a precision digital mass flow meter designed to measure gas flow in laboratory, semiconductor processing, industrial gas delivery, and automated process equipment. This unit is specifically labeled for nitrous oxide (N2O) with a full-scale measurement range of 10,000 SCCM (10 SLM). The 179B series uses thermal mass flow sensing technology and features an all-metal-sealed flow path with 316L stainless steel wetted construction. Unlike a mass flow controller, this instrument measures gas flow without incorporating an internal control valve. It is designed for integration with compatible MKS instrumentation and gas monitoring systems.

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