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MKS 1179A-22628 Mass-Flo Mass Flow Controller (Gas: AR, Range: 2 SCCM)

$324
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Description

MKS 1179A-22628 Mass-Flo Mass Flow Controller (Gas: AR, Range: 2 SCCM). Unit is used with minor cosmetic issues. See pictures, comes as shown. 


Pulled working from a decommissioned Fischione 1010 Low Angle ION Milling and Polishing System.


Info on controller:

  • MKS
  • Mass-Flo Controller 
  • Model #: 1179A-22628
  • Range: 2 SCCM
  • Gas: AR

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cyberjoes

220 2nd St NW

Fayette, AL 35555

Specifications

ManufacturerMKS Instruments Inc.
Model1179A-22628
ConditionUsed
Stock NumberICM986
BrandMKS
Model1179A-22628
TypeMass-Flo Controller
Port Diameter3/8 in
Maximum Flow Rate2 SCCM
Gas MediaAr [Argon]
Accuracy±1% of Full Scale
Repeatability±0.2% of Full Scale
Power Requirements±15 VDC (±5%)
Operational Differential Pressure10 to 40 psid for ranges ≤ 5000 sccm
Maximum Inlet Pressure 150 psig